Semiconductor Chiller - HRZ

Thermo Chiller

SKU: HRZ002-WS-CFW

• Fit it in your semiconductor application – The most reliable chiller for it • Achieve cost reductions – Energy savings of up to 65% thanks to the use of an inverter compressor and pump • Minimise maintenance – The pump housing and heat exchanger are located inside the tank • Maximise the performance of your machine – Great temperature stability ±0.1 °C and set temperature range from -20 to 90 °C.

Thermo Chiller

Serie: HRZ

SKU: HRZ008-L1-CFW

• Fit it in your semiconductor application – The most reliable chiller for it • Achieve cost reductions – Energy savings of up to 65% thanks to the use of an inverter compressor and pump • Minimise maintenance – The pump housing and heat exchanger are located inside the tank • Maximise the performance of your machine – Great temperature stability ±0.1 °C and set temperature range from -20 to 90 °C.

Thermo Chiller

Serie: HRZC

SKU: HRZC002-W1S

• Decrease administration time and costs – CO2 requires no import or usage quotas under the F-Gas Regulation • Simplify transportation – CO2, unlike many traditional refrigerants, is not subject to international air transport restrictions • Use it in the semiconductor industry – Compliant with the SEMI S2, S8, F47 • Reduce your costs – Compressor and pump inverter for energy-efficient performance.

Thermo Chiller

Serie: HRZF

SKU: HRZF010-W1S

• Fit it in your semiconductor application – The most reliable chiller for it • Achieve cost reductions – Energy savings of up to 65% thanks to the use of an inverter compressor and pump • Minimise maintenance – The pump housing and heat exchanger are located inside the tank • Peace of mind with F-gas compliance – R454C refrigerant used (GWP:146).

Thermo Chiller (Co2 Type)

Serie: INR-495

SKU: INR-495-042

• Don't get bothered by the upcoming F-Gas regulation − CO2 refrigerated thermo-chiller. GWP=1 • Simplify your shipping − CO2, unlike many traditional refrigerants, is not subject to international air transport restrictions • Use it in the semiconductor industry − Compliant with the SEMI S2, S8, F47 • Ease your control and maintenance − Advanced control functions and improved maintenance performance.