- Option
- None
- Weight
- 0.055 Kg
- Accuracy
- ±3%F.S. or less
- Approvals
- CE
- Connector
- Lead Wire w/Connector (2 m)
- Enclosure
- IP40
- Flow rate
- 0.2 - 10 l/min (Dry air, N2, Ar) / 0.2 - 5 l/min (CO2)
- Port Size
- C6 (ø6 One-touch Fitting)
- Repeatability
- ±1%F.S. or less (Fluid: Dry air)
- Proof pressure
- 1 MPa
- Flow Rate Range
- 10 [0.2 to 10 (5 for CO2) l/min]
- Indicator light
- Power ON indicator: Lights when power is turned on (Green) / Flow rate indicator: Flashes when flow is applied (Green)
- Applicable fluid
- Dry air, N2, Ar, CO2 (Air quality grade is ISO8573.1-1, 1.2 to 1.6.2.)
- Impact resistance
- 490 m/s2 in X, Y, Z directions 3 times each
- Withstand voltage
- 1000 VAC for 1 min. between external terminal and case
- Instruction Manual
- With Instruction Manual
- Current consumption
- 35 mA or less
- Power supply voltage
- 24 VDC ±10 %
- Vibration resistance
- Without orifice: 10 to 500 Hz with a 1.5 mm amplitude or 98 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller / With orifice: 10 to 150 Hz with a 1.5 mm amplitude or 19.6 m/s2 acceleration, in each X, Y, Z direction for 2 hrs, whichever is smaller
- Flow Adjustment Valve
- None
- Insulation resistance
- 50 MΩ or more (at 500 VDC measured via Megohmmeter) between external terminal and case
- Output Specifications
- 2 [Analogue Output (4 to 20 mA)]
- Piping Entry Direction
- Straight
- Analogue current output
- 4 - 20 mA
- Analogue voltage output
- 1 - 5 V
- Calibration Certificate
- None
- Operating humidity range
- Operating, Stored: 35 - 85%R.H. (with no condensation)
- Pressure characteristics
- ±5%F.S. or less (based on 0.35 MPa)
- Maximum fluid temperature
- 50 °C
- Minimum fluid temperature
- 0 °C (with no freezing and condensation)
- Maximum operating pressure
- 750 kPa
- Minimum operating pressure
- –100 kPa
- Maximum ambient temperature
- Operating: 50 °C / Stored: 60 °C
- Minimum ambient temperature
- Operating: 0 °C / Stored: –10 °C (with no freezing and condensation)
- Temperature characteristics
- ±2%F.S. (15 - 35 °C) / ±5%F.S. (0 - 50 °C)
- Analogue output response time
- 50 msec or 1 s (with response time selection function: 1 s at no-voltage input)
- Changing the Piping Entry Direction
- None
- Analogue current output - Load Impedance
- 50 - 600 Ω
- Analogue voltage output - Output Impedance
- 1 kΩ